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PDF | On Sep 1, , Kari Iltanen published Coupled MEMS Lenk et al. report that in longitudinal oscillators, the electric ﬁeld and. This paper reports on the design and implementation of a low power MEMS oscillator based on capacitively transduced silicon micromachined resonators. Abstract— An array of weakly coupled oscillators can generate multiphase signals, i.e. multiple sinusoidal signals with specific phase separations.